He breathed his last at 5:40pm on Friday at National Heart Foundation Hospital at the capital's Mirpur, said Supreme Court Registrar AKM Shamsul Islam.
Masud, a former Chief Election Commissioner, was the father of High Court judge Justice Salma Masud Chowdhury.
The former Appellate Division jusge also served as the CEC for five years from February 1985. He was also the National Executive Council Chairman of Bangladesh Heart Foundation.
The former judge has left his wife, two daughters and a son, Shamsul Islam said.
He said the deceased's remains will be brought to Supreme Court premises at noon on Saturday for all to pay their last respects. Then a namaz-e-janaza will be held there.
Masud will be laid to eternal rest at the Banani Graveyard later in the day.